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In-vacuum Goniometers multi-axis mechanisms using UHV compatible motors
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| A large portfolio of existing designs is available to be customized at low cost. The cost is less than a comparable externally motorized mechanism.
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All
photos, Copyright © AML, 2002
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- Greater reliability, precision and rigidity and longer travels are achieved by using vacuum motors than by using rotary motion feedthroughs. User convenience and safety are improved in many cases. All AML mechanisms are bakeable to 200°C and may be radiation-hardened.
- Resolutions in rotation of 0.001° and of 1µm in translation are easily achieved. Backlash and repeatability can be controlled to comparable levels. Higher specifications can be accommodated and relaxed specifications may reduce costs. Precision stops allow any position to be found incrementally.
- Sample heating and cooling can be fitted. Sample exchange means and entry locks can be supplied. All in-vacuum wiring may be fitted with connectors. A comprehensive range of controllers and accessories is available.
A typical example 6-axis goniometer for a deposition system. (pictured above)
Up to four samples may be placed on the turntable. The coating
position is at the 12 o'clock orientation and is heated by a PBN heater.
In front of the turntable there is a motorized shutter. In the coating
position the sample can be adjusted in X, Y and tilt (relative to sample
center point). The accuracy is up to 0.001mm/0.01°. The whole assembly
can be turned through >270° to face three different magnetron
sputter sources.
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 | 4-Axis Goniometers in detail |
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